YES oven
Mahnaz Mansourpour
mahnaz at stanford.edu
Thu Jan 25 10:53:03 PST 2007
Hello all,
There will be some lively and happy activities in the litho area on
Monday january 29th.
The entrance of a new stepper through the double door in the litho
area will disturb the activity of our popular YES oven.
Here is the remedy:
From now till Monday say 9 AM do your prime. Leave the wafers on the
WIP rack in the litho area and you will be set for 4 days. I mean you
will have 4 days to spin up resist on your YES ( primed) wafers.
Yes oven will be off from 9 am on Monday 29th to some times around 4 pm
that day so please plan accordingly.
When taking the YES oven cassette out of the yes oven please cool it
off for few minutes on the lid of the green/blue box.
cheers
mahnaz
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