Al2O3 substrates or thin films

Beinn Muir beinnmuir at
Fri Jan 26 16:27:43 PST 2007

Dear Labmembers,

I would like to run a few experiments on Al2O3 thin films. I am not sure if
these substrates are available commercially or whether thermal deposition /
ALD / or sputtering would be possible to form an Al2O3 thin film (on Si for

I would be very grateful for any suggestions or recommendations you may

Best regards,

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