Through Wafer Etching using STS2

Maria Suggs msuggs at
Wed Jul 11 16:08:34 PDT 2007

Hi everybody,

I'm an REU student working on through wafer etching characterization using STS2. I'm wondering if anybody has had experience in the past etching all the way through the wafer using STS2? If so, would you mind if I come and talk to you briefly about it? I'd like to get some feedback and suggestions from you before I proceed.

Thanks for your time in advance, 
Maria Suggs

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