Loaner Alphastep is here

Ted Berg tberg at stanford.edu
Fri Jul 27 11:29:41 PDT 2007


Metrology Equip just left a loaner alphstep. Preliminary indications are 
the stage was driven too far down and jammed it. please use caution and 
stage manipulator to load wafers. This is a delicate tools and repairs 
are costly. thanks,ted



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