MEMS Seminar: Firday 6/15 at 2PM, Packard 101

Maryam Ziaei-Moayyed maryamzm at
Wed Jun 13 12:47:58 PDT 2007

MEMS Seminar Announcement:

WHEN:    Friday 6/15/07  2-3pm
          Refreshments at 1:45pm

WHERE:   Packard 101

TITLE:   Electro Micro Metrology (EMM)

SPEAKER: Prof. Jason Clark
          Dept. of ECE, Purdue University


Research at the micro/nano-scale poses new challenges for metrology and
technological advancement. This talk begins with an overview of several
of these challenges. Then an interesting metrology technique will be
presented, which may be used to help with such challenges. The talk
will conclude with a discussion of a few benefits and applications of
this new methodology.

Advancements in micro/nano-scale materials, sensors, actuators,
typically depend on precise measurements of new phenomena, and accurate
characterizations of performances through modeling.  To verify
analytical and numerical models of such phenomena, it is necessary that
the performance of the models match the performance of the actual
devices. To accomplish this, the model and device must share the same
geometric and material parameters. These parameters should be measured
for each
device because parameters vary across and within fabrication runs. To
address this challenge, EMM is being developed to exploit the strong
coupling between micro/nano-mechanical parameters and precise
micro-electronic measurands. That is, it deduces many geometric,
dynamic, and material properties by electronic probing. Since EMM is
performance-based, it retains a clear meaning to manufacturers and
users; and it applies to a wide variety of micro/nano-devices.
Preliminary results show that EMM is several orders of magnitude more
precise than convention.


Jason Clark is an Assistant Professor of Electrical and Computer
Engineering, and of Mechanical Engineering, at Purdue University. He is
also a faculty member of the Network for Computational Nanotechnology,
and the Birck Nanotechnology Center. Dr. Clark received his Ph.D. in
Applied Science from the University of California at Berkeley, fall
2005. His CAD/E efforts lead to one of the first nodal analysis
software packages for MEMS, called SUGAR (i.e. a SPICE for MEMS). And
his micro-metrology efforts lead to EMM, the first comprehensive
on-chip methods for measuring micro/nano-scale geometry, dynamics, and
material properties. Prior to
professorship, he held positions at Lawrence Livermore National Lab,
Berkeley National Lab, Berkeley Biomedical Microdevices Center,
Berkeley Sensor and Actuator Center, and Coventor.

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