seminar monday 11am

Beth Pruitt pruitt at
Mon Jun 18 12:25:30 PDT 2007

special seminar:

MEMS Strain Sensors and Strain Engineered CMOS  

Professor Toshikazu (Toshi) Nishida
Interdisciplinary Microsystems Group 
Department of Electrical and Computer Engineering
University of Florida

11:00 AM  June 25, 2007 
Hewlett 102

Strain in semiconductors will be discussed in the context of
variable stress strain sensors and fixed stress strain-engineered
advanced CMOS.  Common physics in these different applications will be
outlined.  The design and characterization of a MEMS piezoresistive
microphone and measurement of the piezoresistance coefficients at high
stresses will be described.
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