ITO on patterned metal films.

Anu Chandran chandran at stanford.edu
Thu Jun 21 15:03:28 PDT 2007


Hi all,
Does any one know of a company that can sputter deposit ITO (50-500nm) on
patterned metal films (Au, Al). If you also have some information on  how
much it will cost  per wafer for a deposition, that will be awesome.
Thanks in advance,
Cheers
Anu

-- 
Anu Chandran
Materials Science & Engineering
476 Lomita Mall,McCullough Building
Stanford CA 94305-4045
T:6507236466 Lab
T:6507234874 Office
F:6507249851
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