Disruption to litho services, Wed., 6/27, 10am-noon

Mary Tang mtang at stanford.edu
Mon Jun 25 13:43:36 PDT 2007

Hi everyone --

Good news!  ASML will be bringing some additional equipment for 
installation in the lab.  This is scheduled for this Wednesday morning, 
roughly around 10 am.  This, however, does mean disruption to normal 
operations in the litho area.  The doors between litho and the office 
area will be open, meaning that all the ovens (including the YES oven) 
will be unavailable.  This also means that particles will be introduced 
into the litho area during this time and although they will be flushed 
out quickly, processing is not recommended during this time. 

Thanks to ASML, our lab will have access to some nice, new equipment.  
More details on the new tools and their capabilities will follow soon!


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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