Litho Temp & Humidity control problem

Mary Tang mtang at stanford.edu
Wed Mar 7 09:22:47 PST 2007


Labmembers --

Just to let you know -- The power plant across the street has lost steam,
which means that the lithography area in the lab has little control over
temperature and humidity.  The equipment is still functioning but be aware
of this problem, especially if you have critical litho processes.  Updates
will follow.

The SNF staff



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