SOI wafer vender?
knozawa at stanford.edu
Thu Mar 22 18:21:37 PDT 2007
There are two types in SOI wafer. One is thin type, the other is thick
type. In thin type, device layer thickness is less than 1.5 micro meter,
typically less than 200nm. In thick type, device layer thickness is more
than 2 micro meter. Fabrication methods are quite different each other, so
one wafer vender makes only one type.
It depends on device structure which type you should choose.
Most of fast SOI transistor & photonic crystal require thin type. Some MEMS
requires thick type.
If you need thick type, Ultrasil is good supplier. But they don't sell thin
Soitec is a reliable supplier for thin type SOI wafers.
Visiting scholar in Yamamoto Group, Ginzton Laboratory,
Stanford University, Stanford, CA94305, USA
Phone: 650-725-9346, Fax: 650-723-5320
E-mail: knozawa at stanford.edu
From: Kyeongran Yoo [mailto:raneeyoo at stanford.edu]
Sent: Thursday, March 22, 2007 3:21 PM
To: Labmembers at snf.stanford.edu
Subject: SOI wafer vender?
I am looking for SOI wafer venders. If you have any recommendations for
good vendors for SOI wafers, please let me know.
Thank you very much and have a nice day!
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