SOI wafer vender?
raneeyoo at stanford.edu
Thu Mar 22 21:03:34 PDT 2007
Thank you for your kind email.
I am looking for thin SOI wafers like 400nm BOX and 200nm SOI.
In my case, Ultrasil might not be a choice.
Thank you so much again.
Quoting Katsuya NOZAWA <knozawa at stanford.edu>:
> Hi Kyeongran,
> There are two types in SOI wafer. One is thin type, the other is thick
> type. In thin type, device layer thickness is less than 1.5 micro meter,
> typically less than 200nm. In thick type, device layer thickness is more
> than 2 micro meter. Fabrication methods are quite different each other,
> one wafer vender makes only one type.
> It depends on device structure which type you should choose.
> Most of fast SOI transistor & photonic crystal require thin type. Some
> requires thick type.
> If you need thick type, Ultrasil is good supplier. But they don't sell
> Soitec is a reliable supplier for thin type SOI wafers.
> Sincerely yours,
> Katsuya Nozawa
> Visiting scholar in Yamamoto Group, Ginzton Laboratory,
> Stanford University, Stanford, CA94305, USA
> Phone: 650-725-9346, Fax: 650-723-5320
> E-mail: knozawa at stanford.edu
> -----Original Message-----
> From: Kyeongran Yoo [mailto:raneeyoo at stanford.edu]
> Sent: Thursday, March 22, 2007 3:21 PM
> To: Labmembers at snf.stanford.edu
> Subject: SOI wafer vender?
> I am looking for SOI wafer venders. If you have any recommendations for
> good vendors for SOI wafers, please let me know.
> Thank you very much and have a nice day!
> Kyeongran Yoo
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