Optical Lithography Workshop, Thursday, May 25, 1-5 pm, CISX Auditorium

Mary Tang mtang at stanford.edu
Fri May 11 15:57:40 PDT 2007


Announcing a special workshop on optical lithography, presented by ASML 
and Benchmark Technologies

When: Thursday, May 24, 1-5 pm
Where: Paul Allen Auditorium, CISX-101, Stanford University.

ASML and SNF have joined in a partnership to bring access to new optical 
lithography capabilities to the broader labmember community. ASML is the 
world leader in advanced lithography systems and SNF is pleased to be 
able to facilitate access to these technologies for our labmembers. 
Benchmark Technologies is one of ASML's suppliers of specialized masks. 
This workshop will be the first of many which will consist of tutorials 
on topics ranging from beginning to advanced lithography methods and 
offer a chance for labmembers to interact with applications engineers. 
This first workshop will feature the capabilities of the new ASML PAS 
5500/60 recently installed in our lab and an overview of mask 
technology. The agenda for this first workshop is as follows:

1:00           Overview/Introduction:  ASML - Keith Best/Norbert Kappel
1:10           ASML PAS 5500 Technology Overview:  ASML - Keith Best
2:00           Mask Technology Overview:  Benchmark - Andy Zanzal
3:15           Coffee Break
3:30           ASML - Enabling Technologies: ASML - Keith Best
4:30           Q & A Session:  All
5:00           End of Session                                 

Keith Best, Director of Applications Development for ASML's SA/200mm 
Business Unit, ASML
Norbert Kappel, Marketing manager, ASML Special Applications, ASML
Andrew Zanzal, Vice President of Sales, Benchmark Technologies

Attendees will be eligible for door prizes, generously provided by 
Benchmark Technologies (Handbook of Photomask Manufacturing Technology, 
ed. S. Rizvi and Photomask Fabrication Technology, by B.G. Eynon & B. Wu.)

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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