single-side KOH etching?

[Patrick Lu]

Hi,

I was wondering if people had suggestions for where to get wafer holders
that can accommodate single-side KOH etching of Si wafers. I need something
to protect one side of my 4" wafer while I do a wet etch on the other. I
know I've seen these before in the clean room but I can't for the life of me
remember which company supplied them.

Thanks!
Patrick
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