single-side KOH etching?

Patrick Lu patlu at Stanford.EDU
Fri May 11 16:51:47 PDT 2007


I was wondering if people had suggestions for where to get wafer holders
that can accommodate single-side KOH etching of Si wafers. I need something
to protect one side of my 4" wafer while I do a wet etch on the other. I
know I've seen these before in the clean room but I can't for the life of me
remember which company supplied them.

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