Toxic Gas Alarm, 5/14/07

Mary Tang mtang at
Mon May 14 18:32:43 PDT 2007

Hi all --

As you may know, a toxic gas alarm went off and caused evacuation of the 
lab (though not the building.)  It appears that it wasn't an actual 
toxic that was detected, but rather that the burnbox which treats the 
exhaust from the LP furnaces may have been overloaded.  The LPCVD 
furnaces have been shutdown on Coral until the burnbox can be 
investigated.  Otherwise, the lab is safe to occupy.


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

More information about the labmembers mailing list