BCB/polyimide process

James Harris harris at snow.stanford.edu
Wed May 23 20:38:02 PDT 2007

Hong Liu, one of my former students did some form of polyimde 
planarizing for high speed modulators.  You should look at her thesis 
for possible recipes and if you don't see what you need, I can 
contact her and she is still local, so might even be able to come bye 
some afternoon/evening and look at what you are doing and make 
suggestions.  The other former student who might have useful ideas is 
Chien Chung Lin and he is also still local.  Let me know if you would 
like me to contact any of these people or you need their theses.

At 2:56 PM -0700 5/23/07, mgobet at stanford.edu wrote:
>I am looking into planarizing 5 to 10 um height mesas, either with 
>BCB or polyimide (photosensitive or etchable). I was wondering if I 
>could borrow some BCB or polyimide from somebody to first try my 
>processing. Also, if somebody is interested in sharing BCB or 
>polyimide in the long run, we could split the cost of the material 
>as they are very expensive chemicals.
>I will also appreciate any advice regarding using any of these 
>materials, or processing recipes. Thanks in advance for your help.
>Best regards,


  James S. Harris, '64
  James & Ellenor Chesebrough Professor     E-Mail:Harris at snow.stanford.edu
  Department of Electrical Engineering	   http://www-ee.stanford.edu/~harris/
  420 Via Ortega, CIS-X Rm 328		   Ph:  (650)723-9775
  Stanford, CA 94305-4075   		   Fax: 
  Adm. Asst.: Gail Chun-Creech              Ph:  (650)723-0983

  __   ___
    |  |
     __ arris  Group, Solid State & Photonics Lab
  __|  |__ http://www-snow.stanford.edu/

More information about the labmembers mailing list