Co-polymer Lithography?

Tracy H Fung thfung at
Fri May 25 18:03:15 PDT 2007


I'm working on a project and hoping to use co-polymer lithography  
technique to pattern periodic high aspect ratio nanopillars.  Does  
anyone know if this can be done in the SNF?  And is there anyone  
around able to share their process or help us gain some insight?

Tracy H. Fung

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