graphite as an etch stop?

Kathryn Todd kathrynt at stanford.edu
Thu Nov 1 12:04:58 PDT 2007


Dear Labmembers,

Does anyone have information on the etch rates of oxide etchants such
as HF or dry oxide etches on graphite? I'm looking for something with
no activity whatsoever.
Thanks!

-Kathryn Todd



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