SVG #1 I-line resist update
Gary J Sosa
gsosa at stanford.edu
Thu Nov 8 15:55:57 PST 2007
Hi labmembers...
The new resist pump for 955 0.7 is installed and ready to use. When
using program #5, please us arm program #1 instead of arm progrm #9
for a more accurate resist application. Coatings look very good under
green light. Checked thickness. It is slightly low but we will
continue to monitor. See attachment for thickness data.
....Gary
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