SVG #1 I-line resist update

Gary J Sosa gsosa at stanford.edu
Thu Nov 8 15:55:57 PST 2007


Hi labmembers...

   The new resist pump for 955 0.7 is installed and ready to use. When  
using program #5, please us arm program #1 instead of arm progrm #9  
for a more accurate resist application. Coatings look very good under  
green light. Checked thickness. It is slightly low but we will  
continue to monitor. See attachment for thickness data.

   ....Gary
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