liquid around plasma oxidation tool (TEL SPA)
yoshima at stanford.edu
Sat Nov 10 13:33:09 PST 2007
One of lab member sent me an e-mail and told there is a suspicious liquid
in front of/underneath TEL SPA last mid night.
It is probably coolant for this tool called GALDEN (fluorinated carbon)
because of its higher viscosity.
GALDEN has non-reactivity, high dielectric strength, low toxicity,
non-flammability... So it is safe. Only hazard might be it make floor
slippery. I put a yellow tape just in case. I will work with Ted to fix it.
Prof. McIntyre Gr.
Materials Science and Engineering
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