Smoothest Al at SNF?

John Ross Jameson jameson at
Mon Nov 12 11:33:07 PST 2007

Hi All,

Does anyone know which tool and deposition conditions at SNF yield the 
smoothest Al films?  I was told the gryphon is the best, but I haven't
seeen hard evidence.  I'm aiming for a thickness of ~1000A, but would
compromise thickness for lower roughness.

Thanks in advance,

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