ASM-L Scheduled Downtime

Gary J Sosa gsosa at stanford.edu
Mon Nov 12 14:55:55 PST 2007


Hello Labmembers....

   This Email is to inform you that the ASM Stepper will go down on  
Monday, November 19th at 9:00 AM and will be down till at least  
Monday, November 26. The tool will be down to install an inline  
regulator to improve the control of the lens helium pressure. The  
lengthy downtime is required to do a thorogh lens purge,  re-establish  
stable lens pressure and to do the baseline metrology setups. I will  
keep you informed if anything unusual comes up or if the work is  
completed earlier than expected.

   Thanks..  Gary



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