YES oven is up!
Gary J Sosa
gsosa at stanford.edu
Fri Nov 16 15:55:32 PST 2007
The replacement YES oven is up and ready to use. It may look a
little different but the operation is still the same. The "Start" and
"Reset" buttons are located in the center of the control panel. Please
also read the note on the chamber door regarding the alarm conditions.
A steady state audible alarm and light indicate that the program cycle
has completed with no problems. A beeping alarm and flashing light
indicates an abort condition for vacuum setpoint not reached. 2 test
wafers were processed and measured to verify contact angle. Both
wafers looked good. 5 points were measured on each wafer. Wafer #1-
contact angle ~ 63 degrees. 2nd wafer contact angle- ~66 degrees. The
system is currently not interlocked through coral. Please continue to
enter comments, observations or problems in coral.
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