clean Si pocket wafer for tylan nitride?

Kyeongran Yoo raneeyoo at stanford.edu
Wed Nov 28 16:03:10 PST 2007


Dear Labmembers,

I would like to deposit nitride on small pieces of Si and SOI wafers  
using tylan nitride.
I am wondering if one of you have a clean Si pocket wafer.
It would be great if you could let me use your pocket wafer.
Please let me know and thank you very much.

best,
Kyeongran Yoo



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