From mbaran at stanford.edu Mon Oct 1 10:17:22 2007 From: mbaran at stanford.edu (Maureen Baran) Date: Mon, 1 Oct 2007 09:17:22 -0800 Subject: Watch found in the Lab Message-ID: <20071001171722.5BC254BFDE@smtp1.stanford.edu> If you have misplaced your watch, come see me in cubicle 41. Please be prepared to describe it, along with, letting me know the make of the watch. Maureen Maureen Baran Stanford Nanofabrication Facility Lab Services Administrator mbaran at stanford.edu 650-725-3664 -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 2 07:31:04 2007 From: tberg at stanford.edu (Ted Berg) Date: Tue, 02 Oct 2007 07:31:04 -0700 Subject: Vacuum wand issues Message-ID: <47025628.8060202@stanford.edu> Hello all, As some of you might be aware we have recently had numerous issues with the vacuum wands on the furnaces I have contacted the vendor of our vacuum wands and it looks like the bonder they use to attach the quartz to the metal is breaking down(melting ) as the wands are used. They are not sure if it is a shelf life issue or just a bad batch of the adhesive. They will repair our bad wands and have suggested an alternative. Even though the quartz is rated to 1400 degrees C the adhesive obviously is not.. Thank you for your patience. ted From mtang at stanford.edu Tue Oct 2 08:09:48 2007 From: mtang at stanford.edu (mtang at stanford.edu) Date: Tue, 02 Oct 2007 08:09:48 -0700 Subject: CAD Room Cleanup Deadline-11/1 Message-ID: <20071002080948.6lm4ujhi0wsw0wgg@webmail.stanford.edu> Hi everyone -- Just a reminder: in preparation for the annual lab cleanup, there will be the CAD room cleanup. If you wish to continue storing personal items stored in the CAD room (CIS 151), please take care of them as per the rules below. We will otherwise assume that items and boxes without appropriate labeling are abandoned and will be removed: http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:2890:200709:diimpckilcinejppocjp Please help us keep SNF somewhat organized, if not neat -- Your SNF staff From mahnaz at stanford.edu Tue Oct 2 08:53:09 2007 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 02 Oct 2007 08:53:09 -0700 Subject: WIP rack cleanup Message-ID: <47026965.3000303@stanford.edu> Hello everyone, Please and please cleanup the wip rack in the litho area immediately. There are boxes that covering the sign and that is not a good sign. I am giving it till this Friday (10/5) to some how for the rack look neat, other wise I will do the cleanup and that won't be a good sign either. There should be ONLY two rows of boxes on the top shelf. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From leonardc at bonair.stanford.edu Tue Oct 2 12:45:32 2007 From: leonardc at bonair.stanford.edu (Leonard Chan) Date: Tue, 2 Oct 2007 12:45:32 -0700 Subject: Contractor Testing Of Sensors Message-ID: To All Building Occupant and Lab Members, The contractor will be testing the newly install Satellites sensors unit for CIS/CISX TGO system on October 4, 2007 from 8:00AM to 12:00 noon. The test will involve challenging the sensors with a target gas and see if it will do all what it is supposed to do. Some lights and horns will be triggered and gases could be shut off during this test. Announcements will be made to the lab members in the SNF facility prior to any testing. You are not required to evacuate the fab or the building during these times unless you are told to do so. Lab members will see a number of staff reservations on tools during these times. During the testing it is possible the gas cabinets will be shutdown preventing the flow of process gases to these tools. To prevent any tools from aborting, these tools will be off-line during the testing. Gases that could be shutoff during this test are NH3, B2H6, GeH4, AsH3 and PH3. If you have any questions or concern, please feel free to contact any SNF staff member. We are sorry for the inconveniences this cause. Thank you for your patience. Thanks, Leonard From mtang at stanford.edu Tue Oct 2 14:42:36 2007 From: mtang at stanford.edu (Mary Tang) Date: Tue, 02 Oct 2007 14:42:36 -0700 Subject: Chlorine Update Message-ID: <4702BB4C.8090703@stanford.edu> Hi everyone -- As you probably know, chlorine gas has been shut off to key etchers since the incident involving a contractor last month. Elmer and Cesar have arranged for repairs which are being done right now. Once complete, there will be extensive cycle purging, static pressure and helium leak testing to ensure line integrity as well as quality of the delivered gas. We anticipate these should be complete this coming Monday, when the line is to be certified by a third-party service. Then, etchers will be brought back on-line one at a time in the following order: p5000etch, pquest, then lampoly. We trust we should be back on-line with all etchers by the end of next week. We will keep everyone posted of any changes to this plan. Our deepest apologies for this inconvenience -- we thank you for your patience as we work to ensure this gas supply is as safe as we know how. Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From leonardc at bonair.stanford.edu Wed Oct 3 14:24:43 2007 From: leonardc at bonair.stanford.edu (Leonard Chan) Date: Wed, 3 Oct 2007 14:24:43 -0700 Subject: FW: Contractor Testing Of Sensors Message-ID: To All, Due to the meeting that is being held at the CISX auditorium, the gas test for the TGO system at CIS/CISX is reschedule from 12:00 noon to 3:00 PM tomorrow, Oct. 4, 2007. Thanks, Leonard -----Original Message----- From: Leonard Chan [mailto:leonardc at bonair.stanford.edu] Sent: Tuesday, October 02, 2007 12:46 PM To: cis-building at cis.stanford.edu; labmembers at snf.stanford.edu Subject: Contractor Testing Of Sensors To All Building Occupant and Lab Members, The contractor will be testing the newly install Satellites sensors unit for CIS/CISX TGO system on October 4, 2007 from 8:00AM to 12:00 noon. The test will involve challenging the sensors with a target gas and see if it will do all what it is supposed to do. Some lights and horns will be triggered and gases could be shut off during this test. Announcements will be made to the lab members in the SNF facility prior to any testing. You are not required to evacuate the fab or the building during these times unless you are told to do so. Lab members will see a number of staff reservations on tools during these times. During the testing it is possible the gas cabinets will be shutdown preventing the flow of process gases to these tools. To prevent any tools from aborting, these tools will be off-line during the testing. Gases that could be shutoff during this test are NH3, B2H6, GeH4, AsH3 and PH3. If you have any questions or concern, please feel free to contact any SNF staff member. We are sorry for the inconveniences this cause. Thank you for your patience. Thanks, Leonard From sjo at stanford.edu Wed Oct 3 17:22:33 2007 From: sjo at stanford.edu (Sebastian J. Osterfeld) Date: Wed, 03 Oct 2007 17:22:33 -0700 Subject: Help - Vendor for 6" notched wafers? In-Reply-To: <46A982C5.7030908@scipp.ucsc.edu> References: <000001c7cfd6$94594da0$8e2842ab@pettesmacbook> <46A982C5.7030908@scipp.ucsc.edu> Message-ID: <47043249.7080908@stanford.edu> Hello, I'm trying to find a vendor who can ship a small batch of 6" notched wafers - i.e. those that have a notch, rather than a flat, as the alignment feature. Any grade, orientation, and thickness will do. We just need them to practice dicing. Thanks! -- Sebastian J. Osterfeld, Ph.D. Shan X. Wang Group Dept. of Materials Science & Engineering Stanford University McCullough Building, Room 208A 476 Lomita Mall Stanford, CA 94305-4045 Phone: (650) 906-1946 Fax: (650) 736-1984 Email: sjo at stanford.edu Office: http://maps.google.com/maps?f=q&hl=en&q=w122.1732+n37.4275&ll=37.427502,-122.173204&spn=0.006296,0.013561&t=h From barlian at stanford.edu Thu Oct 4 15:36:19 2007 From: barlian at stanford.edu (A. Alvin Barlian) Date: Thu, 4 Oct 2007 15:36:19 -0700 Subject: MEMS and Nanotechnology for the Automotive Market - Prof. Al Pisano Message-ID: <2E21C67C-67A9-43D7-ABD0-5F85262A1CC4@stanford.edu> Just a friendly reminder, Albert Pisano, Professor and Chair of Dept. of Mechanical Engineering of UC Berkeley is giving a talk on MEMS and Nanotechnology for the Automotive Market. Location: EDUC128 Time: 4.15pm today (Oct 4) The flier is attached here. -------------- next part -------------- A non-text attachment was scrubbed... Name: Pisano.pdf Type: application/pdf Size: 65035 bytes Desc: not available URL: -------------- next part -------------- Alvin From pskuo at stanford.edu Fri Oct 5 10:50:18 2007 From: pskuo at stanford.edu (Paulina Kuo) Date: Fri, 05 Oct 2007 10:50:18 -0700 Subject: University PhD Dissertation Defense / Paulina S. Kuo (Monday, Oct. 15) Message-ID: <6.2.1.2.2.20071005104247.03164008@pskuo.pobox.stanford.edu> Sorry if you receive this announcement more than once. ____________________________________________ Department of Applied Physics University Ph.D. Dissertation Defense Thick-Film, Orientation-Patterned Gallium Arsenide for Nonlinear Optical Frequency Conversion Paulina Susan Kuo Research Advisor: Professor Martin M. Fejer 15 October 2007 4:15 pm (refreshments at 4:00 pm) Applied Physics, Room 200 ABSTRACT Optical frequency conversion using quasi-phasematched (QPM) nonlinear optical crystals is a powerful technique for generating coherent radiation in wavelength ranges where lasers are not readily available. Quasi-phasematched GaAs is an ideal material for generating infrared light for applications in spectroscopy and infrared countermeasures. Orientation-patterned gallium arsenide (OP-GaAs) is a type of QPM GaAs that has been recently developed. In OP-GaAs, periodic inversions of the crystallographic orientation are epitaxially grown into the material. The growth process involves molecular beam epitaxy, lithographic definition of QPM periods, and hydride vapor phase epitaxy. Significant progress has been made in increasing the quality of OP-GaAs material; periods as small as 30 microns have been grown in 0.5 mm thick films and overall thicknesses of 1 mm have been achieved. Furthermore, OP-GaAs loss measurements show attenuation coefficients of 0.005 cm-1, measured at 2-micron wavelength. This thesis discusses growth improvements in OP-GaAs and the characterization of these improvements. The improved material quality in OP-GaAs has allowed the demonstration of efficient nonlinear optical frequency conversion in the mid-infrared wavelength range. Several nonlinear optical devices were demonstrated in bulk OP-GaAs. Pumped near 3-micron wavelength, an extremely broadband infrared spectrum (spanning 4.5-11 microns) was obtained using optical parametric generation in OP-GaAs. I will also discuss an experiment exploring polarizations combinations of the interacting light waves in OP-GaAs. High symmetry in the nonlinear susceptibility tensor in GaAs together with isotropy in its refractive index allow efficient nonlinear optical mixing with circularly polarized or even depolarized waves. Efficient pumping of an OP-GaAs OPO with circularly polarized and depolarized light was achieved. -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Fri Oct 5 11:08:36 2007 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Fri, 5 Oct 2007 11:08:36 -0700 Subject: Machine shop on campus Message-ID: <016e01c8077a$bfe43df0$3facb9d0$@edu> Hello, I am looking for a machine shop to modify some vacuum fittings, does anyone know if there is one on campus? Thanks, Arash ------------------------------------------------ Arash Hazeghi P.h.D Candidate, Stanford Center for integrated Systems, CIS-X 300 420 Via Palou Mall, Stanford, CA 94305 phone:(650)725-0418 http://www.stanford.edu/~ahazeghi -------------- next part -------------- An HTML attachment was scrubbed... URL: From mcvittie at cis.Stanford.EDU Fri Oct 5 11:41:39 2007 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Fri, 5 Oct 2007 11:41:39 -0700 (PDT) Subject: Machine shop on campus In-Reply-To: <016e01c8077a$bfe43df0$3facb9d0$@edu> Message-ID: Arash, I guess you do not know about the Physics Machine Shop in Varian. Jim On Fri, 5 Oct 2007, Arash Hazeghi wrote: > Hello, > I am looking for a machine shop to modify some vacuum fittings, does anyone > know if there is one on campus? > > Thanks, > > Arash > > > > ------------------------------------------------ > Arash Hazeghi > > P.h.D Candidate, > Stanford Center for integrated Systems, CIS-X 300 > 420 Via Palou Mall, Stanford, CA 94305 > phone:(650)725-0418 > http://www.stanford.edu/~ahazeghi > > > -- -------------------------------------------------------------- Jim McVittie, Ph.D. Senior Research Scientist Allen Center for Integrated Systems Electrical Engineering Stanford University jmcvittie at stanford.edu Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075 Tel: (650) 725-3640 From shott at stanford.edu Sat Oct 6 01:58:23 2007 From: shott at stanford.edu (John Shott) Date: Sat, 06 Oct 2007 01:58:23 -0700 Subject: Burning smell in stsetch2 .... Message-ID: <47074E2F.1060703@stanford.edu> An HTML attachment was scrubbed... URL: From ehe at stanford.edu Mon Oct 8 08:27:56 2007 From: ehe at stanford.edu (Elizabeth Edwards) Date: Mon, 8 Oct 2007 08:27:56 -0700 Subject: no sulfuric acid Message-ID: There's no sulfuric acid in the chemical pass-through. The wbdiff can't be used until this is restocked. From mtang at stanford.edu Mon Oct 8 09:29:51 2007 From: mtang at stanford.edu (Mary Tang) Date: Mon, 08 Oct 2007 09:29:51 -0700 Subject: no sulfuric acid In-Reply-To: References: Message-ID: <470A5AFF.8060003@stanford.edu> David restocked this morning. Apologies for the inconvenience. All wet bench users: PLEASE LOG your acid use at each station. This information will help us determine usage patterns and hopefully allow us to avoid this kind of situation. Thanks, Your SNF staff Elizabeth Edwards wrote: > There's no sulfuric acid in the chemical pass-through. The wbdiff > can't be used until this is restocked. > -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Tue Oct 9 16:25:25 2007 From: mtang at stanford.edu (Mary Tang) Date: Tue, 09 Oct 2007 16:25:25 -0700 Subject: AWN problems and Wet Bench Use tonight Message-ID: <470C0DE5.9040307@stanford.edu> Hi everyone -- We experienced an AWN excursion just now. The problem appears to be a somewhat sticky valve in the neutralization system. The system seems to be working for now. Repairs are schedule for the morning. For tonight, please try to minimize the use of wet stations (i.e., dumping chemicals). If the yellow AWN light flashes in the lab, DO NOT DUMP CHEMICALS (ACIDS/BASES) AT ANY WET BENCH. Apologies for the inconvenience, but this is a safety and environmental concern. The Facilities crew will address this as soon as they can. Your SNF Staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From kimsora at stanford.edu Wed Oct 10 10:58:24 2007 From: kimsora at stanford.edu (Sora Kim) Date: Wed, 10 Oct 2007 10:58:24 -0700 Subject: STS2 undercut? Message-ID: <00ae01c80b67$274501b0$6e3242ab@GoSora> Hi, I am just wondering about how much undercut I get when I etch 5 um polysilicon in STS2. A long time ago, I heard that the undercut is 0.5um. Is there a recipe that gives smaller undercut than 0.5um? Is there difference about undercut between having a photo-resist mask and an oxide mask? I have 4um wide features, so 1um undercut from both sides is detrimental to my devices. Thanks, Sora -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Wed Oct 10 12:05:13 2007 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 10 Oct 2007 12:05:13 -0700 Subject: SVGcoat dummy Message-ID: <470D2269.2010400@stanford.edu> Hello all, Please bring back the SVG coat dummy box, Mario and Uli looked every where. We have lost more than 8 litho boxes since January, if you find these boxes cute and handy; I will be more than happy to give you the information of how to order them. mahnaz From tberg at stanford.edu Fri Oct 12 06:20:59 2007 From: tberg at stanford.edu (Ted Berg) Date: Fri, 12 Oct 2007 06:20:59 -0700 Subject: Vacuum wand update Message-ID: <470F74BB.3030900@stanford.edu> Hello All, As some of you may be aware we have recently had some issues with our vacuum wands. The issue is that the cement that hold the quartz to the metal tube seems to have disappeared making the quartz loose to rotate. I have contacted both the manufacturer of the wands and the cement manufacturer and they are looking into the issue. The president of H-square came out himself, as well as the production manager yesterday to look at our setup and to get ideas. Thats customer service. They gave us replacement wands to replace those that had issues and are continuing to investigate. He also left a cordless battery operated wand for evaluation that will be floating around the lab for feedback. Please let me know if you have any other vacuum wand issues and i will relay them to the manufacturer. ted From mtang at stanford.edu Fri Oct 12 13:48:09 2007 From: mtang at stanford.edu (Mary Tang) Date: Fri, 12 Oct 2007 13:48:09 -0700 Subject: CAD Room Cleanup Reminder! Deadline 11/1/07 Message-ID: <470FDD89.3000200@stanford.edu> Hi everyone -- Just another reminder: in preparation for the annual lab cleanup, there will be the CAD room cleanup. If you wish to continue storing personal items stored in the CAD room (CIS 151), please take care of them as per the rules below. We will otherwise assume that items and boxes without appropriate labeling are abandoned and will be removed: http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:2890:200709:diimpckilcinejppocjp Please help us keep SNF somewhat organized, if not neat -- Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From nishiy at stanford.edu Sat Oct 13 10:37:06 2007 From: nishiy at stanford.edu (Yoshio Nishi) Date: Sat, 13 Oct 2007 10:37:06 -0700 Subject: FW: Journal Covers Message-ID: <000e01c80dbf$acb72ee0$4f1142ab@stanford.edu> Dear labmembers: Our NSF grant for SNF/NNIN will soon face renewal for the next 5 years. One of the critical measures of the impact of research being done at SNF is whether your work is highlighted on technical journal covers, such as Nature, Science or similar journals. If you have such example(s), please send me, John Shott and Paul Rissman, the citation or actual cover at your earliest convenience. Thank you in advance for your help and support. Yoshio Nishi From jonschuller at yahoo.com Mon Oct 15 18:27:44 2007 From: jonschuller at yahoo.com (jon schuller) Date: Mon, 15 Oct 2007 18:27:44 -0700 (PDT) Subject: heavily doped Silicon wafers Message-ID: <904816.74414.qm@web51403.mail.re2.yahoo.com> Hello all, Does anyone know of a good vendor for very heavily doped Si wafers? I would like doping levels between 10^19 and 10^20 per cubic centimeter (or higher). The doping type (p or n) and wafer size don't matter. Thanks, Jon ____________________________________________________________________________________ Yahoo! oneSearch: Finally, mobile search that gives answers, not web links. http://mobile.yahoo.com/mobileweb/onesearch?refer=1ONXIC From leet at stanford.edu Tue Oct 16 16:09:07 2007 From: leet at stanford.edu (Thomas T. Lee) Date: Tue, 16 Oct 2007 16:09:07 -0700 Subject: Empty SMD and/or SOIC packages Message-ID: <47154493.4050501@stanford.edu> Hi everyone, I'm looking for empty SMD or SOIC packages with glass covers to house some bare-die photodetectors. Does anyone know of a vendor where I can get these? (A contact for a person/company who can do the packaging for me would be helpful as well!) Thanks, --Tom -- "We choose to go to the moon. We choose to go to the moon in this decade and do the other things, not because they are easy, but because they are hard..." --John F. Kennedy From mtang at stanford.edu Thu Oct 18 07:44:26 2007 From: mtang at stanford.edu (Mary Tang) Date: Thu, 18 Oct 2007 07:44:26 -0700 Subject: CAD Room Cleanup -- Deadline 11/1/07 Message-ID: <4717714A.4070604@stanford.edu> Hi everyone -- Just yet another reminder: in preparation for the annual lab cleanup, there will be the CAD room cleanup. If you wish to continue storing personal items stored in the CAD room (CIS 151), please take care of them as per the rules below. We will otherwise assume that items and boxes without appropriate labeling are abandoned and will be removed: http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:2890:200709:diimpckilcinejppocjp Please help us keep SNF somewhat organized, if not neat -- Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mahnaz at stanford.edu Thu Oct 18 10:16:39 2007 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 18 Oct 2007 10:16:39 -0700 Subject: YES oven Message-ID: <471794F7.3070200@stanford.edu> Hello all, As you all know the YES oven is down, Gary and Mario are hard at work to fix it. I have been told that The YES oven most likely be up by tomorrow. Mean time, please remember that you need to have your wafers singed in the SINGE oven ( 150C) at least 30 minutes before using the prime station on the track. Mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From rissman at stanford.edu Fri Oct 19 10:09:39 2007 From: rissman at stanford.edu (Paul Rissman) Date: Fri, 19 Oct 2007 10:09:39 -0700 Subject: Optical Lithography Strategy Message-ID: <200710191709.l9JH9fQp014482@smtp-roam.Stanford.EDU> Dear Labmembers: As you know, acquisition of the ASML stepper has greatly improved the capability to do lithography at SNF. We now have a factory reconditioned tool which is covered by a maintenance contract for at least the next 3 1/2 years. ASML staff have been on site 3 days a week to support special applications. In addition, some of the users have learned that they can save on mask costs, since 5" reticles can be fabricated on the Micronic and it is fairly straightforward to put multiple levels on one reticle. For example, the six EE410 mask levels fit on three reticles. Given this improvement, we have been able to migrate users off our older, less supportable tools, in particular the Ultratech and Nikon body 4. Here is our plan for those tools in the future. Ultratech: For more than one year now, we have been discouraging users from starting new projects on that tool. It is no longer supportable - we have limited maintenance help from either Ultratech or 3rd party companies. Parts continue to be a problem, and we are starting to run out of those we have been able to cannibalize off the previously retired instrument. Documentation and software for the system are non-existent. Like a 22 year old car, the cost of maintaining this instrument far exceeds its usefulness. Mahnaz, Mario and Gary will continue to support the few existing users through the end of this year, and then we will retire the stepper. While I understand that this may be difficult for some users, we will do everything possible to ease your transition to the ASML or one of the contact printers. Nikon body 4: Regretably the story is not much different for the Nikon. While we DO NOT PLAN TO RETIRE THE NIKON AT THIS TIME getting parts and service on the 20 year old instrument continues to be exceedingly difficult. NPI has only limited interest or knowledge of servicing the stepper. We have found 3rd party vendor that can supply parts, but has been reticent to service the tool. Many of the parts on the system are wearing out. For example, failures have occurred because small tygon pneumatic hoses are drying out and cracking. Many of these are almost impossible to service without complete disassembly of the machine. The system continues to limp along, but we strongly discourage users from starting new projects. Hopefully we can define a retirement strategy for the Nikon in 2008. Obviously, if we only have the ASML, even with a service contract, there is some risk. However, there are many ASML instruments in the field, including at UC Berkeley and some of the other NNIN sites. We know that we can match our system to the UC system since ironically supporting them was the first project on our stepper. In the long term, we are hoping to secure an ASML 2500 generation system as backup. We realize that these changes can be difficult and inconvenient. However, in the long term, making the transition to a more reliable (and more capable) lithography tool will make your project go more quickly and enhance your results. Please let me know if you have any questions or concerns. Paul Rissman From mbaran at stanford.edu Fri Oct 19 14:31:21 2007 From: mbaran at stanford.edu (Maureen Baran) Date: Fri, 19 Oct 2007 13:31:21 -0800 Subject: Newest Lab Member Message-ID: <20071019213121.7C5934BE2A@smtp1.stanford.edu> Dear Lab Members, There has been a few sighting of bug(s) on the first floor of the CIS building. We just had an Exterminator come out and look over the situation. He truly believes it is from the on going construction right outside our building. He said that sometimes when the water or steam is turned off and on, the creatures that are in the pipeline come to the surface. The Exterminator has placed several sticky traps throughout the first floor. He will continue to monitor the traps for the next couple of weeks. Maureen Maureen Baran Stanford Nanofabrication Facility Lab Services Administrator mbaran at stanford.edu 650-725-3664 -------------- next part -------------- An HTML attachment was scrubbed... URL: From agibby at stanford.edu Sat Oct 20 12:25:55 2007 From: agibby at stanford.edu (Aaron Matthew Gibby) Date: Sat, 20 Oct 2007 12:25:55 -0700 Subject: Strong Smell in Litho Area Message-ID: <20071020122555.k3pb4ph5w0sco448@webmail.stanford.edu> Labmembers, There is a strong smell in the litho area. The staff has been notified. Until the smell has been identified, the litho area is off limits. For now, the smell has not spread to the rest of the fab, so the fab remains open. Aaron From rissman at stanford.edu Sat Oct 20 13:29:40 2007 From: rissman at stanford.edu (rissman at stanford.edu) Date: Sat, 20 Oct 2007 13:29:40 -0700 Subject: lithography now open Message-ID: <20071020132940.aj006fuau8cwwo08@webmail.stanford.edu> Labmembers, At around noon, a strong solvent smell was reported in lithography. The area was evacuated and the doors taped closed. I arrived at about 1:15 and checked the area with the RKI unit with Aaron Gibby's help. I could not smell any solvent smell, although Aaron did report a faint trace. I looked for and could not find any obvious puddles. The RKI unit did not register any hydrocarbon response. I checked in and under the SVG and KS coaters and at the YES oven, and in both finger walls. Aaron removed the tape and we have reopened the area. Should anyone smell anything, please close down the area again and keep it evacuated. Paul Rissman From mtang at stanford.edu Sun Oct 21 12:37:53 2007 From: mtang at stanford.edu (Mary Tang) Date: Sun, 21 Oct 2007 12:37:53 -0700 Subject: SNF Lab Lost-and-Found/CAD room Cleanup 11/1/07 Message-ID: <471BAA91.2060408@stanford.edu> Hi everyone -- Items from the lost-and-found normally in the gowning room have been moved to a box labeled "2007 Lost-and-Found" in the CAD room. This box is located between the first and second bank of shelves as you enter. Please remember that the CAD Room cleanout will commence on Nov. 1. By the way, the CAD room is looking a lot neater now (thanks, all!) but there are still a lot of wafer boxes -- please remember wafer boxes must be stored inside a labeled, transparent plastic bin. (Anything found outside of a plastic bin is subject to reclaim on Nov. 1.) For more info about CAD room storage, see: http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:2890:200709:diimpckilcinejppocjp Thanks for your attention -- Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From nayoung at stanford.edu Tue Oct 23 10:56:06 2007 From: nayoung at stanford.edu (Na Young Kim) Date: Tue, 23 Oct 2007 10:56:06 -0700 Subject: In-Ga eutectic to Si wafer Message-ID: <20071023105606.f1k2k19qu8ggc44w@webmail.stanford.edu> Dear labmembers: I am wondering if anyone has experience to use In-Ga eutectic to make ohmic contacts to Si wafer. Due to the liquid phase at room temperature, it is tricky to make connection to Cu wire leading to the outside electronics. I managed to make ohmic contacts using In-Ga eutectic and Silver paint to glue Cu wires to the eutectic after etching Si wafer in 3-10 % HF solution at room temperature, but the ohmic contacts were not preserved at low temperatures below 200 K. If you know any trick to glue the wires to In-Ga eutectic in Si-wafer and you don't mind sharing it with me, i really appreciate it! Thanks, Na Young From mtang at stanford.edu Tue Oct 23 13:04:58 2007 From: mtang at stanford.edu (Mary Tang) Date: Tue, 23 Oct 2007 13:04:58 -0700 Subject: Follow up on Litho Odor on Saturday, 10/20/07 Message-ID: <471E53EA.7080002@stanford.edu> Hi everyone -- You may have seen Aaron Gibby's note on Saturday calling for an evacuation of litho due to a strong smell in that area of the lab. http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:2921:200710:hednkjcdbibliclphmpp The odor was determined to be due to a labmember's use of the headway bench -- a previous user apparently left a lot of stuff and the subsequent user tried to work around it, and so was likely not working fully under the ventilated area (remember, behind the red line!) This labmember and his lab mate, however, could not smell the odor, although others did. So, the moral of the story: 1. Clean up after yourself. This is not only courteous, but a good safety practice! 2. Before working at a station, make sure it is clean and set up so that you can work safely! 3. It's too easy to get used to a smell -- Don't rely on your nose; rely on good lab practices! And please contact your favorite staff member if there are any concerns or questions. (By the way, for those who may be interested, the chemicals causing the odor are: butyl acetate; 4-butyrolactone; and 1-methoxy-2-propanol acetate. The OSHA PEL limit (exposure limit over 8 hours) for butyl acetate is 150 ppm (for comparison, PEL for isopropanol is 400 ppm.) No PEL limits are established for the other chemicals, but none are identified as carcinogens. These chemicals, in fact, are considered industry standard "safe" solvents for photolithography and are components in most of our standard resists and removers. However, we all should make every effort to avoid exposing ourselves and others in the lab.) Finally, we want to commend Aaron for doing exactly the right thing -- any time you feel safety is compromised, ACT! Thanks for your attention -- Your SNF Staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Tue Oct 23 16:54:29 2007 From: mtang at stanford.edu (Mary Tang) Date: Tue, 23 Oct 2007 16:54:29 -0700 Subject: Wet Bench Availability, 10/26-10/27 Message-ID: <471E89B5.80502@stanford.edu> Hi all -- Facilities will be performing repairs on one of two scrubber units serving our lab. With half the scrubber capacity available, we will be shutting down some of the less-utilized wet benches in order to maintain exhaust levels on the high-use benches. At 8 am on Friday, Oct. 26, the following wet benches will be drained and shutdown: wbebeam, wbnitride, wbgen2, wbsilicide, wbmiscres, solvhood, and possibly wbmetal. The scrubber to be repaired will be shut off later that morning. Exhaust will then be checked to ensure proper ventilation of the remaining wet benches. Repairs are expected to be complete on Saturday, Oct. 27. We anticipate turning on most of the shutdown wet benches by Saturday afternoon/evening. We apologize for the inconvenience, but trust that we will have a much more reliable (and quieter!) scrubber system after these repairs. Your SNF Staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Wed Oct 24 10:05:25 2007 From: mtang at stanford.edu (Mary Tang) Date: Wed, 24 Oct 2007 10:05:25 -0700 Subject: Personal Chemicals Cleanup (11/15/07)/Yellow Cabinets/Sharps Waste/ Message-ID: <471F7B55.905@stanford.edu> Greetings labmembers: A few announcements: 1. Personal Chemicals in the Flammables Cabinet: If you have your own resists, developers, polymers, and other personal chemicals stored in the small Flammables cabinet in the service area, please be aware that there will be a cleanup on Nov. 15. Any items that are not properly labeled or have a date from 2006 or earlier or do not have a date will be removed and disposed of. If you are still using such chemicals, make sure to relabel before Nov. 15. 2. The Lab Flammables cabinets which hold the standard litho chemicals and solvents have been moved to L117. When not in use, the stainless carts are kept there as well. This area has better temperature control, which should improve the performance and lifetime of the resists, not to mention, is more conveniently located for labmembers. (Gee, great idea, why didn't we do this years ago? Oh, there was that implanter there...) Many thanks to Mario, Ray, Mike, Gary, & Elmer for this nice, new arrangement! 3. The Sharps Waste container is still located next to the standard Flammables cabinets -- but now this is in L117 as well. Please don't leave broken wafers in the service area. Thanks for your attention -- Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Thu Oct 25 16:19:00 2007 From: mtang at stanford.edu (Mary Tang) Date: Thu, 25 Oct 2007 16:19:00 -0700 Subject: Check Tool Status on the Lab Blog! Message-ID: <47212464.70909@stanford.edu> **Hi everyone -- You've asked for it... and now, check out the SNF lab blog ! This beta-version covers only select areas of the lab (etch & epi) but we hope to expand the scope in coming months. Please send comments and suggestions to webteam at snf. (And props to Elmer, our savvy web guru, for pulling this together.) The SNF Web Team -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Thu Oct 25 17:53:22 2007 From: mtang at stanford.edu (Mary Tang) Date: Thu, 25 Oct 2007 17:53:22 -0700 Subject: Wet Bench Availability - 10/26-10/29 (Note Date Change!) Message-ID: <47213A82.20006@stanford.edu> Apologies, everyone -- A change of plans.... Yes, several wet benches will still be shut down starting around 8 am tomorrow morning. However, they will remain down until Monday morning... The wet benches that will be shutdown are: wbebeam, wbnitride, wbgen2, wbsilicide, solvhood, and possibly wbmetal if additional scrubber capacity is needed to keep the remaining wet benches operational. Again, apologies for the inconvenience. Let us know if there are any issues of hardship... Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From jerabek at snf.stanford.edu Mon Oct 29 15:23:28 2007 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Mon, 29 Oct 2007 14:23:28 -0800 Subject: laser mask writer Message-ID: <000b01c81a7a$59bc3ce0$916540ab@czech1> To whom it may concern: Micronic mask writer is down with a stage problem. Field service has been notified. -Paul J. -------------- next part -------------- An HTML attachment was scrubbed... URL: From ehe at stanford.edu Mon Oct 29 19:04:43 2007 From: ehe at stanford.edu (Elizabeth Edwards) Date: Mon, 29 Oct 2007 19:04:43 -0700 Subject: high index spin-on coating Message-ID: Dear Labmembers, Does anyone know of a high refractive index (>2) spin-on optical coating? Best Regards, Liz Edwards From gabrielles at ee.stanford.edu Tue Oct 30 07:55:29 2007 From: gabrielles at ee.stanford.edu (Gabrielle Brits) Date: Tue, 30 Oct 2007 07:55:29 -0700 Subject: Stanford-Tohoku University Open Workshop on 3D transistors and applications Nov. 20 Message-ID: <472745E1.4030905@ee.stanford.edu> Dear SNF Faculty and Staff, We, Stanford University and Tohoku University, will have an open workshop on 3D Transistors and its Applications as you see in the attachment. This workshop is open to everybody who are interested in this subject area, and will be held on November 20 (Tuesday), 2007 in the CISX Auditorium in CIS building, Stanford University. It will start at 9:00am and consist of 8 presentations by those who have been highly acknowledged experts and actively involved in research of this exciting area. Registration is free, and we would like to have many lively discussions about the future of 3D device structures and processes looking into the future technology nodes. I look forward to seeing you on November 20th . Best regards, Yoshio Nishi -------------- next part -------------- A non-text attachment was scrubbed... Name: StanfordOpenWorkshop.ppt.ppt Type: application/vnd.ms-powerpoint Size: 5650944 bytes Desc: not available URL: From jerabek at snf.stanford.edu Wed Oct 31 15:32:24 2007 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Wed, 31 Oct 2007 14:32:24 -0800 Subject: mask writer Message-ID: <001201c81c0d$eda6bfe0$916540ab@czech1> To whom it may concern: to update the status of MIcronic mask writer- system has a problem with homing to exposure start position. The problem is interminent, but so far I was able to coax the machine to cooperate. Once it starts to write everything is O.K until it finishes the job and looses it's start position once again. So I am writing some masks but not at a regular pace. Micronic filed eng. did not show up yet. They said they will come sometimes at the end of the week. -Paul J. -------------- next part -------------- An HTML attachment was scrubbed... URL: From slcheng at stanford.edu Wed Oct 31 20:11:48 2007 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Thu, 1 Nov 2007 11:11:48 +0800 Subject: Looking for SiGe recipe for Tylan SiGe Message-ID: <200711011813.lA1IDQoC006353@smtp-roam.Stanford.EDU> Dear Labmembers: I am currently planning to deposit an amorphous SiGe film ontop of SiO2 by the tylanSiGe tube. The concentration of Ge will be 5 to 20%. Therefore, it will be very helpful for me to have any similar recipes as references. Does any one have some experiences related. Thank you very much. Best Regards Szu-Lin Cheng -------------- next part -------------- An HTML attachment was scrubbed... URL: