Contractor Testing Of Sensors
leonardc at bonair.stanford.edu
Tue Oct 2 12:45:32 PDT 2007
To All Building Occupant and Lab Members,
The contractor will be testing the newly install Satellites sensors unit for
TGO system on October 4, 2007 from 8:00AM to 12:00 noon. The test will
the sensors with a target gas and see if it will do all what it is supposed
to do. Some
lights and horns will be triggered and gases could be shut off during this
Announcements will be made to the lab members in the SNF facility prior to
testing. You are not required to evacuate the fab or the building during
times unless you are told to do so.
Lab members will see a number of staff reservations on tools during these
During the testing it is possible the gas cabinets will be shutdown
the flow of process gases to these tools. To prevent any tools from
these tools will be off-line during the testing. Gases that could be shutoff
this test are NH3, B2H6, GeH4, AsH3 and PH3.
If you have any questions or concern, please feel free to contact any SNF
We are sorry for the inconveniences this cause. Thank you for your patience.
More information about the labmembers