Contractor Testing Of Sensors

Leonard Chan leonardc at bonair.stanford.edu
Tue Oct 2 12:45:32 PDT 2007


To All Building Occupant and Lab Members,

The contractor will be testing the newly install Satellites sensors unit for
CIS/CISX
TGO system on October 4, 2007 from 8:00AM to 12:00 noon. The test will
involve challenging
the sensors with a target gas and see if it will do all what it is supposed
to do. Some
lights and horns will be triggered and gases could be shut off during this
test.

Announcements will be made to the lab members in the SNF facility prior to
any
testing. You are not required to evacuate the fab or the building during
these
times unless you are told to do so.

Lab members will see a number of staff reservations on tools during these
times.
During the testing it is possible the gas cabinets will be shutdown
preventing
the flow of process gases to these tools. To prevent any tools from
aborting,
these tools will be off-line during the testing. Gases that could be shutoff
during
this test are NH3, B2H6, GeH4, AsH3 and PH3.

If you have any questions or concern, please feel free to contact any SNF
staff
member.

We are sorry for the inconveniences this cause. Thank you for your patience.

Thanks,

Leonard




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