Chlorine Update

Mary Tang mtang at
Tue Oct 2 14:42:36 PDT 2007

Hi everyone --

As you probably know, chlorine gas has been shut off to key etchers 
since the incident involving a contractor last month.  Elmer and Cesar 
have arranged for repairs which are being done right now.  Once 
complete, there will be extensive cycle purging, static pressure and 
helium leak testing to ensure line integrity as well as quality of the 
delivered gas.  We anticipate these should be complete this coming 
Monday, when the line is to be certified by a third-party service.  
Then, etchers will be brought back on-line one at a time in the 
following order:  p5000etch, pquest, then lampoly.  We trust we should 
be back on-line with all etchers by the end of next week.  We will keep 
everyone posted of any changes to this plan.

Our deepest apologies for this inconvenience -- we thank you for your 
patience as we work to ensure this gas supply is as safe as we know how.

Your SNF staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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