Wet Bench Availability - 10/26-10/29 (Note Date Change!)

Mary Tang mtang at stanford.edu
Thu Oct 25 17:53:22 PDT 2007

Apologies, everyone --

A change of plans....  Yes, several wet benches will still be shut down 
starting around 8 am tomorrow morning.  However, they will remain down 
until Monday morning...  The wet benches that will be shutdown are:  
wbebeam, wbnitride, wbgen2, wbsilicide, solvhood, and possibly wbmetal 
if additional scrubber capacity is needed to keep the remaining wet 
benches operational.

Again, apologies for the inconvenience.  Let us know if there are any 
issues of hardship...


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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