Looking for SiGe recipe for Tylan SiGe

Szu-Lin Cheng slcheng at stanford.edu
Wed Oct 31 20:11:48 PDT 2007


Dear Labmembers:

 

I am currently planning to deposit an amorphous SiGe film ontop of SiO2 by
the tylanSiGe tube.

The concentration of Ge will be 5 to 20%.

Therefore, it will be very helpful for me to have any similar recipes as
references.

Does any one have some experiences related.

Thank you very much.

 

Best Regards

                             Szu-Lin Cheng

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