Looking for SiGe recipe for Tylan SiGe
slcheng at stanford.edu
Wed Oct 31 20:11:48 PDT 2007
I am currently planning to deposit an amorphous SiGe film ontop of SiO2 by
the tylanSiGe tube.
The concentration of Ge will be 5 to 20%.
Therefore, it will be very helpful for me to have any similar recipes as
Does any one have some experiences related.
Thank you very much.
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