Ag dry etch recipe?

Aaron Hryciw ahryciw at stanford.edu
Tue Apr 1 14:30:25 PDT 2008


Hello labmembers -

Does anyone know of a well-controlled dry etch recipe for Ag?  Also, does
anyone know of a good wet etch chemistry yielding low etch rates (~10
nm/minute or so) for Ag?  I'd appreciate any advice on the matter.

Cheers!

 - Aaron


-- 
Aaron Hryciw
Postdoctoral Scholar
Geballe Laboratory for Advanced Materials
Stanford University
476 Lomita Mall (04-490)
McCullough Building, Rm. 325
Stanford, CA 94305-4045

Tel.: (650) 723-5840
Fax.: (650) 736-1984
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