Platinum etchant

Joong Sun Park mrjpark at stanford.edu
Thu Apr 10 05:05:06 PDT 2008


Hi all,
Does anyone know if there is a platinum etchant in SNF?
I googled and people used to make solution with 7HCl:1HNO3:8H2O at 60  
deg.
Is there pre-mixed etchant? Also I'm wondering whether the etchant  
could remove oxide underneath the platinum which should be avoided.
Please let me know best process for patterning platinum rather than  
lift-off.
Thanks.

Cheers,
Joongsun




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