LED wafers and processing

James Harris harris at snow.stanford.edu
Mon Apr 14 10:04:43 PDT 2008

You are asking for what people are currently doing research on, so 
there are absolutely no vendors who can supply what you are looking 
for.  You will have to do a great deal of the work yourself, 
including process development and work with one of the groups putting 
III-V materials onto Si, which isn't so hard, but trying to do mixed 
processing is literally impossible except by research groups working 
on mixed III-V/Si as NO ONE wants to risk contamination of any decent 
Si processing equipment.  I would suggest that the two best chances 
are at the NNUN facilities at UCSB and Cornell as they have far more 
III-V work and relatively little Si, so tend to already be 
"contaminated".  I would first look at Cornell as they not only have 
a lot of III-V work, but also considerable Si based MEMS activity.
Good luck,
Jim Harris

>         I am trying to make a simple LED structure on silicon 
>wafers.  Could anyone please tell me if there are groups or vendors 
>that can make a few wafers with LED materials (such as III-Vs) on 
>top?  Emission in the visible will be desirable. 
>        Also, post processing is needed for the wafers and the tools 
>I need are DRIE for silicon, pin-hole free LPCVD/PECVD oxide (to 
>coat and protect my structures for XeF2 etch in a later step), oxide 
>etcher, metal sputtering, and metal etcher.  I assume that all LED 
>materials will be considered gold contaminated.  I was told that 
>Santa Barbara has contaminated DRIE.  I tried searching the NNIN 
>sites but they don't have the cleanliness category listed on the 
>website.  Could anyone please also let me know if there are any 
>places or vendors that can provide these services/tools?
>Kevin Huang
>Ph.D. Candidate
>Stanford Organic Electronics Lab
>Dept. of Electrical Engineering
>Email: <mailto:kevhuang at stanford.edu>kevhuang at stanford.edu
>Phone: (650) 725-6924
>================================== !DSPAM:480134c9123471923448402!


  James S. Harris, '64
  James & Ellenor Chesebrough Professor     E-Mail:Harris at snow.stanford.edu
  Department of Electrical Engineering	   http://www-ee.stanford.edu/~harris/
  420 Via Palou Mall, CIS-X Rm 328		   Ph:  (650)723-9775
  Stanford, CA 94305-4075   		   Fax: 
  Adm. Asst.: Gail Chun-Creech              Ph:  (650)723-0983

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