photo resist pretreatment before ion implantation

SangBum Kim kimsangb at
Thu Apr 17 12:51:17 PDT 2008

Dear SNF labmembers,


 Could anyone give me some advice on typical photoresist pretreatment before
ion implantation, please?

 For example, do I need 1) UV hardening of resist or 2) heat treatment? Any
other suggestions?


 I plan to use ion implantation service from Innovion and use 1.6um thick
SPR 3612 as a photoresist with maximum As ion energy of 180keV.




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