photo resist pretreatment before ion implantation
kimsangb at stanford.edu
Thu Apr 17 12:51:17 PDT 2008
Dear SNF labmembers,
Could anyone give me some advice on typical photoresist pretreatment before
ion implantation, please?
For example, do I need 1) UV hardening of resist or 2) heat treatment? Any
I plan to use ion implantation service from Innovion and use 1.6um thick
SPR 3612 as a photoresist with maximum As ion energy of 180keV.
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