Etching of ITO
sergei at scipp.ucsc.edu
Tue Apr 22 16:11:48 PDT 2008
Depends on your sample's feature size, I guess. We are using HCL liquid
etching in our electrode array fabrication. The thickness of our ITO
film is 200 nm and it's usually gone in 8 minutes. Some overetch time
will be helpful.
Wanki Kim wrote:
> Hi all,
> I am trying to make an electrode using ITO.
> Could anyone please tell me the way how to etch ITO?
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