Etching of ITO

Sergei Kachiguin sergei at scipp.ucsc.edu
Tue Apr 22 16:11:48 PDT 2008


Depends on your sample's feature size, I guess. We are using HCL liquid 
etching in our electrode array fabrication. The thickness of our ITO 
film is 200 nm and it's usually gone in 8 minutes. Some overetch time 
will be helpful.

Take care,
Sergei

Wanki Kim wrote:

>  Hi all,
>
>  I am trying to make an electrode using ITO.
>  Could anyone please tell me the way how to etch ITO?
>  Thanks.
>
>  Best,
>  Wanki
>  
>





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