Conditions update at 8:30pm Monday

Robin King robinhmb at
Mon Aug 18 20:31:46 PDT 2008

Main lab 
56F and 63% humidity

59F and 60% humidity

--- On Mon, 8/18/08, Gary J Sosa <gsosa at> wrote:

> From: Gary J Sosa <gsosa at>
> Subject: Litho Area Conditions
> To: "labmembers at" <labmembers at>
> Date: Monday, August 18, 2008, 6:23 PM
> Hi All....
>    Mary mentioned in her email that there is no steam
> generation at  
> this time and that the lab feels cold. As of 6:00 PM  the
> temperature  
> near the SVG coaters was 63 degrees and the humidity was 61
> %. You may  
> want to reconsider doing Litho tonight, until the
> temperature and  
> humidity are at optimal conditions. The temp and humidity
> will have an  
> affect on the photoresist and you may not get the results
> that you  
> expect. Please be very cautious and take this into
> consideration so  
> that you will not have to rework you wafers. There is a
> digital meter  
> on the rack next to the SVG coaters. Typically the
> temperature is 70  
> degrees and the humidity is around 42%. If steam generation
> does not  
> come back online, conditions may get worse as the outside
> conditions  
> change and the lab has no way to compensate.
>     .. Gary


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