sts oxide etch
ytanster at gmail.com
Wed Aug 20 14:35:21 PDT 2008
I have been experiencing a significant oxide loss when running the stsetch
(I & 2). My 600 A thick oxide is generally etched away within 40 minutes
using either the "smooth-shallow" recipe or the "deep" recipe. My process
requires an etch time of at least 90minutes with an etch rate of 4um
silicon/min. Does anyone have any alternative recipes or recommendations on
what oxide thickness I should use? Thank you very much for your help.
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