sts oxide etch

Mike Tan ytanster at
Wed Aug 20 14:35:21 PDT 2008

Dear Labmembers,

I have been experiencing a significant oxide loss when running the stsetch
(I & 2).  My 600 A thick oxide is generally etched away within 40 minutes
using either the "smooth-shallow" recipe or the "deep" recipe.  My process
requires an etch time of at least 90minutes with an etch rate of 4um
silicon/min.  Does anyone have any alternative recipes or recommendations on
what oxide thickness I should use?  Thank you very much for your help.

Mike Tan
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