Special Seminar, 2 pm TODAY, CIS 101: Keith Best (ASML)

Mary Tang mtang at stanford.edu
Fri Aug 22 11:26:59 PDT 2008

Greetings labmembers:

Are you interested in back-to-front submicron patterning?  Are you 
interested in wafer-level stitching?  Does your wafer process sequence 
lead to difficulty in precision alignment?  Then come to Keith Best's 
presentation this afternoon.  Keith is the Director of Special 
Applications from ASML and he will describe the 3D align system which is 
installed and recently qualified on the ASML in our lab.  He promises 
interesting examples (and ASML goodies) for attendees.  Anyone in the 
Stanford/SNF community is welcome.

This seminar will be held today (Friday), at 2 pm in CIS 101.

Hope to see you there!

Your ASML & SNF Litho staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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