Anyone used BCB (benzocyclobutene) before?

Yoonyoung Chung yoonyoung.chung at stanford.edu
Mon Dec 15 11:00:01 PST 2008


Hello, labmember.

Is there anyone who used BCB (benzocyclobutene) in the lab before?  I
plan to use it for a dielectric between metal interconnect lines.  I
would appreciate getting your advice about BCB process.  Thank you.



Regards,
Yoonyoung


-- 
Yoonyoung Chung
Ph.D. Candidate
Department of Electrical Engineering
Stanford University

Email: yoonyoung.chung at stanford.edu
---------------------------------------------------------
Final judge is by Nature itself



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