Ultratech: Down for good....

Mary Tang mtang at stanford.edu
Thu Feb 7 18:52:39 PST 2008

Dear labmembers:

It is with deepest regret and a sigh of relief that we report the 
remaining ultratech stepper is down for good.  With blood, sweat, and 
tears, Mahnaz, Mario, Gary, and Cesar kept the machine limping along for 
months (years?) until the last user reported his project complete.

For SNF, the Ultratech 1000 stepper was a workhorse system:  easy to use 
and reliable, until age and obsolescence began to take its toll.   In 
its time, it had state-of-the-art autoalignment capability and was the 
industry standard.  It (or rather, a slightly earlier model) is 
commemorated on the insightful Chip History website:


It remains in the lab, though will be removed soon.   We will hold a 
memorial ceremony then and all will be welcome to join.

The SNF Litho Team

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

More information about the labmembers mailing list