Process Grand Rounds THIS Friday/Demo Video

Mary Tang mtang at
Wed Feb 13 07:52:50 PST 2008

Greetings labmembers:

Due to popular demand (and rapidly growing list of proposed topics for 
discussion), it looks like we'll have another Process Grand Rounds THIS 
Friday, 2/15, at 11:30 in CIS 101.  (For minutes of last week's session, 
check  http://snf/Labmembers/ProcessGrandRound020808.html ).  All are 
welcome to attend.  The topics for discussion:

1.  Wafer handling on the ASML (presented by the ASML Team, subject to 
availability of presentation materials)  and update on action items from 
last Friday's brainstorming.

2.  Brainstorming session on performance issues with STS etch (everyone 
is encouraged to bring data, recipes, etc.)

3.  Quick 10 minute planning session for future Process Grand Rounds.  
As long as there are topics of interest, we'll keep holding them.  If we 
can set agendas for the next few sessions, people can plan ahead and 
bring/prepare materials to share.

Pizza will be provided.  Hope to see you there!

Your SNF Staff

PS:   Mike Deal has produced the coolest video ever of the (de)struction 
next door.  To see it, check out the links on the SNF home page.  Enjoy!

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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