Ferric Chloride (FeCl3) Etch Mask?

James Q. Liu James.Q.Liu at jdsu.com
Fri Feb 29 11:33:45 PST 2008

I have used FeCl3 to etch InP anisotropically in the past. The mask was
the plated gold pad. The collimated UV light was used to guide the
etching. Proper agitation of FeCl3, or the sample rotation in my case,
was important.

Hope it helps.


-----Original Message-----
From: Kevin Crabb [mailto:kcrabb at stanford.edu] 
Sent: Thursday, February 28, 2008 5:16 PM
To: labmembers at snf.stanford.edu
Subject: Ferric Chloride (FeCl3) Etch Mask?

I'm hoping to etch patterns into/through copper, nickel, and/or aluminum
foils using an aqueous solution of FeCl3.  I was wondering if anybody
any experience etching any metals with FeCl3, and which masks work for
process.  Any help would be greatly appreciated!  Thanks,
kcrabb at stanford.edu 

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