LTO Upgrade

Ted Berg tberg at stanford.edu
Tue Jul 1 06:42:20 PDT 2008


Hello All,
    As part of the effort to continually improve the. lab, LTO/BPSG will 
be giong down in approximately 3 weeks for a gas jungle retrofit.  This 
will bring the gas delivery system  close to current technology. It will 
also make the system more maintainable. At this point the furnace will 
be down for approximately 3 weeks ( for retrofit as well as process 
qual/characterization).   Please try and complete any work that needs 
this tool by this time. If you have any serious conflicts please advise 
one of the staff ASAP. Thanks for your cooperation in advance. Ted



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