Oxide etching

Houbi Nguyen hnguyen0 at stanford.edu
Tue Jul 8 08:18:37 PDT 2008


Hello everyone.  I have a question regarding native oxide etching.   
Does anyone know of a method by which I can strip off native oxide  
(i.e., for a pre-diffusion cleaning) without using a fluorine- 
containing mixture, specifically HF?  Thanks for the help.
Houbi
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