Problem "Power off"

JinHong Park jhpark9 at
Sat Jul 12 16:50:11 PDT 2008

Hi all,

Furnaces (tylan 1-12, but thermco is fine), epi (1 and 2), and RTA  
(Ag4100 and 4108) were suddenly turned off at around 4:30pm on Sat.


JinHong Park (Ph.D. Candidate)
Department of Electrical Engineering, Stanford University
Cubicle 45, B113, Center for Integrated Systems(CISX),
420 Via Palou, Stanford, California, 94305

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