Problem "Power off"

JinHong Park jhpark9 at stanford.edu
Sat Jul 12 16:50:11 PDT 2008


Hi all,

Furnaces (tylan 1-12, but thermco is fine), epi (1 and 2), and RTA  
(Ag4100 and 4108) were suddenly turned off at around 4:30pm on Sat.

Jin-Hong


-- 
JinHong Park (Ph.D. Candidate)
Department of Electrical Engineering, Stanford University
Cubicle 45, B113, Center for Integrated Systems(CISX),
420 Via Palou, Stanford, California, 94305








More information about the labmembers mailing list