SNF Power Glitch, 7-12-08

Ed Myers edmyers at stanford.edu
Sat Jul 12 19:56:06 PDT 2008


All,

The fab is recovering from a short power glitch late this 
afternoon.  Most of the tools have been restarted, but we are waiting 
on some of the metal deposition cryo's to recover and the ASML.  In 
addition the burn box for the ASM epi and STS PECVD are still in fault.

Please review comments in Coral before running any of the tools.  The 
tool you want may be fine, waiting for recovery or down until further notice.

Sorry for the interruption,
SNF Staff




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