SiO2 sputtering

Yoonyoung Chung yoonyoung.chung at
Fri Jul 18 13:32:57 PDT 2008

Dear labmembers,

Is there anyone who did SiO2 sputtering before?  I am developing my
process for sputtered ~10 nm SiO2.  I am concerning the roughness and
density of the film.  I would like to get advice if some labmembers
have previous experience.  Thanks.


Yoonyoung Chung
Ph.D. Candidate
Department of Electrical Engineering
Stanford University

Email: yoonyoung.chung at
Final judge is by Nature itself

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