Mechanical post CMP scrub

Arvind Kamath akamath at
Sun Jun 8 11:43:19 PDT 2008


   I am looking for a post (metal) CMP mechanical brush scrub cleaning service preferably in Silicon Valley.  Something on the lines of an Ontrak brush scrub for 4" wafers would be very useful.

                    Arvind Kamath
                    Kovio Inc.

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