etching LTO

[Hector Cavazos]

Like thermal oxide:

  - can LTO be etched with HF based wet etchants?

- can LTO be etched with RIE?

 

Is there any known difficulties with the above etch techniques and known
workarounds?

 

Thanks

 

____________________________________

Hector Cavazos

Asylum Research

 

 

 

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