high selective etching of SiO2 over SiN

Yuan Zhang zhangy at stanford.edu
Thu May 22 18:46:58 PDT 2008


Hi Labmembers,

 

I need to etch SiO2 film without affecting the SiN layer underneath. I
wonder if you know any recipe that has highly etching selectivity of SiO2 to
SiN. By the way, both oxide and nitride layers are deposited by PECVD.
Thanks in advance!

 

Thanks,

Yuan

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