high selective etching of SiO2 over SiN

Yuan Zhang zhangy at stanford.edu
Thu May 22 18:46:58 PDT 2008

Hi Labmembers,


I need to etch SiO2 film without affecting the SiN layer underneath. I
wonder if you know any recipe that has highly etching selectivity of SiO2 to
SiN. By the way, both oxide and nitride layers are deposited by PECVD.
Thanks in advance!




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