2nd MEMS Seminar This Wednesday: Diversity of MEMS Inertial Sensor Technologies. Nov. 5th, 4-5pm in CISX-101

Roozbeh Parsa rparsa at stanford.edu
Tue Nov 4 12:17:46 PST 2008

MEMS Seminar Announcement:

(MEMS Lab2)

Wednesday, Nov. 5th, 2008
4:00 – 5:00 pm

Diversity of MEMS Inertial Sensor Technologies.

Dr. St.J. Dixon-Warren
QUALCOMM MEMS Technologies, Inc.

We will present recent MEMS reverse engineering results which illustrate the diversity of technologies currently used in the commercial manufacturing of MEMS inertial sensors. In comparison to CMOS, which is highly converged across the industry, a surprising range of technologies are used to fabricate accelerometers and gyroscopes, including surface micro-machined polysilicon, surface micro-machine silicon, and bulk micro-machined silicon. More recently, a thermal device has appeared on the market, which is fabricated with a CMOS process and involves no moving parts. Most inertial sensor manufacturers have adopted a two-chip solution, while a few provide integrated single chip solution. The latter provides lower cost packaging at the price of higher chip cost. The MEMS industry is poise for dramatic growth over the new few years, as inertial sensors are widely incorporated into consumer electronics and achieve greater penetration into the automotive sector. Currently, MEMS inertial sensors are manufactured by both large and small independent device manufacturers (IDM’s) and by fabless design houses. A question of interest to the industry is whether we will see dramatic convergence and consolidation. This process may be accelerated by the entrance of large Asian foundries in to the MEMS manufacturing sector.

St.J. Dixon-Warren (Sinjin) is the manager of Chipworks Technical Intelligence Process Engineering team. He is also Chipworks leading analyst covering devices in the MEMS industry and, most recently spoke on MEMS devices. Dr. Dixon-Warren earned his PhD in Chemical Physics from the University of Toronto and spent two years as NATO Postdoctoral Fellow at the University of Cambridge and in the faculty at Washington State University. Dr. Dixon-Warren made the switch to industry with Nortel Networks Optical Components division before moving on to Chipworks as a technical analyst. Dr. Dixon-Warren is an author on more than forty research publications. He is married and has three children.

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