Cleanliness & Contamination Mtg - Friday, Nov. 7, 3 pm, CIS 101
mtang at stanford.edu
Thu Nov 6 07:06:52 PST 2008
Hi all --
You are invited to another exciting installment of the "Cleantamination"
meeting, this Friday (tomorrow) at 3 pm in CIS 101. On the agenda:
- Ed will present a review of the criteria and rationale for SpecMat
policies. Our objective is to integrate this structures into the
decision-making of this forum.
- Update from working groups (ALD, stsetch/2, testing, RTA.)
Next meeting will be in two weeks in which Jim McVittie will review
methods for quantifying contamination.
About this group: "Cleantamination" is a working group on Cleanliness
and Contamination. It is comprised of labmembers, PI's, and staff
working to facilitate process flow sequences for novel materials while
protecting against cross-contamination which affect device performance.
All members of the lab community are welcome to attend and contribute.
For summaries of the last meeting:
More information about the labmembers